Souček Pavel ( search by name in IS MU /auth )

Body na spoluautora Body za publikaci pro MU Odkaz ISVaV
0,00 0,00 Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering
0,00 0,00 Influence of N2 and CH4 on deposition rate of boron based thin films prepared by magnetron sputtering
0,00 0,00 Hybrid PVD-PECVD sputtering deposition process - from properties of deposited films to process characteristics
Back
(c) Michal Bulant, 2011