Maršík Přemysl ( search by name in IS MU /auth )

Body na spoluautora Body za publikaci pro MU Odkaz ISVaV
0,00 0,00 Optimization of UV curing: Effect of wavelength on critical properties of low-k dielectrics
0,00 0,00 Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment
6,72 6,72 Optical characteristics and UV modification of low-k materials
65,00 65,00 Optical Property Changes in Low-k Films upon Ultraviolet-Assisted Curing
0,00 0,00 Spectroscopic elipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
1,68 6,72 Frequency- and temperature-dependent conductivity at the metal-insulator transition in phosphorus doped silicon studied by far-infrared ellipsometry
0,00 0,00 Changes of UV Optical Properties of Plasma Damaged Low-k Dielectrics for Sidewall Damage Scatterometry
32,55 32,55 Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
0,00 0,00 Application of UV Irradiation in Removal of Post-etch 193 nm Photoresist
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(c) Michal Bulant, 2011